Titlebook: Laser Processing of Thin Films and Microstructures; Oxidation, Depositio Ian W. Boyd Textbook 1987 Springer-Verlag Berlin Heidelberg 1987 A

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Ian W. Boydtion oriented results obtained in a government funded national German research project are described in detail. Along the technological chain after a short introduction in the second chapter diode laser bar technology is discussed regarding structure, manufacturing technology and metrology. The thir

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Introduction,he world in recent years. After a brief summary of the history of the field in relation to the more traditional industrial applications of lasers in cutting, drilling and welding, the special advantages afforded by laser processing are discussed. Here, the unique properties of lasers are introduced,

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hypotension

Experimental Considerations,ewed, including the definitions of spot size, divergence, depth of focus etc, as well as the characteristics of beam propagation. Optical resolution is also discussed, not only in terms of the properties of the laser radiation, but also particular physical and chemical mechanisms that ultimately can

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Laser-Assisted Oxidation and Nitridation,d reaction in this area, forms the largest section of the chapter, although nitridation, and polymerization of thin organic films by laser induced thermal effects will also be discussed here. The tables in this chapter summarize all the oxide films formed by laser induced mechanisms that have been r

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Laser-Induced Deposition,ormer is closely related to traditional chemical vapour deposition, but with use of lasers significantly enhanced reaction rates can be achieved. Laser photolysis utilises selective photochemical bond-breaking, so that much reduced processing temperatures can be employed. Oxide and nitride depositio

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Material Removal,lytic and photochemical etching, photon-induced ablation, controlled evaporation, and reactive cutting. A compilation of the different combinations of lasers and presursors used in recent years to pattern and develop a wide variety of materials, including not only insulators and polymers, but also m

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Summary and Conclusions,hapter, we discuss and compare the growth rates and physical properties of these layers. Since laser processing can also be extended to semiconducting, conducting, and superconducting films, we also discuss and assess the potential applications of the technology to specific device-oriented fields.