| 书目名称 | Laser Heat-Mode Lithography | | 副标题 | Principle and Method | | 编辑 | Jingsong Wei | | 视频video | | | 概述 | Systematically describes laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer. | | 丛书名称 | Springer Series in Materials Science | | 图书封面 |  | | 描述 | .This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size.Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advance | | 出版日期 | Book 2019 | | 关键词 | Phase change; Thermal diffusion; Arbitrary pattern writing; Metallo-organic compound; Maskless lithograp | | 版次 | 1 | | doi | https://doi.org/10.1007/978-981-15-0943-8 | | isbn_softcover | 978-981-15-0945-2 | | isbn_ebook | 978-981-15-0943-8Series ISSN 0933-033X Series E-ISSN 2196-2812 | | issn_series | 0933-033X | | copyright | Springer Nature Singapore Pte Ltd. 2019 |
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发表于 2025-3-21 19:51:27
