Titlebook: Laser Heat-Mode Lithography; Principle and Method Jingsong Wei Book 2019 Springer Nature Singapore Pte Ltd. 2019 Phase change.Thermal diffu

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Jingsong WeiSystematically describes laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer.

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Laser Heat-Mode Lithography978-981-15-0943-8Series ISSN 0933-033X Series E-ISSN 2196-2812

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High-Speed Rotation-Type Laser Heat-Mode Lithography System,r writing system to conduct heat-mode lithography, the writing speed is slow. For example, the real velocity of traditional .–.-type vector-mode writing is only several millimeters or centimeters per second due to continuous deceleration.

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Titlebook: Laser Heat-Mode Lithography; Principle and Method Jingsong Wei Book 2019 Springer Nature Singapore Pte Ltd. 2019 Phase change.Thermal diffu

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