Titlebook: Introductory MEMS; Fabrication and Appl Thomas M. Adams,Richard A. Layton Textbook 2010 Springer-Verlag US 2010 PED.Sensor.integrated circu

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Creating structures—Micromachiningo create and transfer patterns using photolithography. We next turn our attention to using the substrate, thin film deposition, and pattern transfer processes to create the actual structures that make up a MEMS device. This shaping of materials into structural elements is commonly known as ..

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MEMS transducers—An overview of how they work to devices that converted mechanical stimuli such as force or pressure into an electrical signal, usually voltage. Today the definition has been broadened to include all forms of input stimuli—mechanical, electrical, fluidic, or thermal—and output signals other than electrical.

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978-1-4899-8421-0Springer-Verlag US 2010

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Capacitive transducersconstitute the sensed output. Capacitive actuation makes uses the same principle with the input and output switched; that is, an electrical input causes at least one electrode to move, thereby causing actuation.