| 书目名称 | Introductory MEMS | | 副标题 | Fabrication and Appl | | 编辑 | Thomas M. Adams,Richard A. Layton | | 视频video | http://file.papertrans.cn/475/474467/474467.mp4 | | 概述 | One of the first texts written that is accessible to undergraduate technical majors regardless of specific discipline.Describes sensors, actuators, and microfluidics, and their relationship with MEMS. | | 图书封面 |  | | 描述 | .Introductory MEMS: Fabrication and Applications. is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter...Introductory MEMS: Fabrication and Applications. is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.. | | 出版日期 | Textbook 2010 | | 关键词 | PED; Sensor; integrated circuit; mechanics; metal-oxide-semiconductor transistor; microelectromechanical | | 版次 | 1 | | doi | https://doi.org/10.1007/978-0-387-09511-0 | | isbn_softcover | 978-1-4899-8421-0 | | isbn_ebook | 978-0-387-09511-0 | | copyright | Springer-Verlag US 2010 |
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