书目名称 | Introduction to VLSI Process Engineering |
编辑 | The Society of Chemical Engineers of Japan |
视频video | http://file.papertrans.cn/475/474308/474308.mp4 |
图书封面 |  |
描述 | Integrated circuits are finding ever wider applications througha range of industries. Introduction to VLSI Process Engineeringpresents the design principles for devices, describes the overallVLSI process, and deals with the essential manufacturing technologiesand inspection procedures. |
出版日期 | Book 1993 |
关键词 | manufacturing; process engineering; semiconductor; semiconductor technology; silicon |
版次 | 1 |
doi | https://doi.org/10.1007/978-94-011-1562-9 |
isbn_softcover | 978-94-010-4682-4 |
isbn_ebook | 978-94-011-1562-9 |
copyright | Chapman & Hall 1993 |