书目名称 | Introduction to Microsystem Design |
编辑 | Werner Karl Schomburg |
视频video | |
概述 | Many tables with equations required for calculations of basic elements.Systematic description of most actuators and sensors in micro technique.Includes exercises Characteristic curves of most actuator |
丛书名称 | RWTHedition |
图书封面 |  |
描述 | The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book. |
出版日期 | Book 20111st edition |
关键词 | Basic elements and effects; Chracteristic curves; Microsystem Design; Systematic tables of equations |
版次 | 1 |
doi | https://doi.org/10.1007/978-3-642-19489-4 |
isbn_softcover | 978-3-642-26852-6 |
isbn_ebook | 978-3-642-19489-4Series ISSN 1865-0899 Series E-ISSN 1865-0902 |
issn_series | 1865-0899 |
copyright | Springer-Verlag Berlin Heidelberg 2011 |