| 书目名称 | Introduction to Microsystem Design |
| 编辑 | Werner Karl Schomburg |
| 视频video | |
| 概述 | Provides a thorough revision of the first edition.Covers important topics in the field of micro systems.Written by an expert in the field.Includes supplementary material: |
| 丛书名称 | RWTHedition |
| 图书封面 |  |
| 描述 | .This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.. |
| 出版日期 | Book 2015Latest edition |
| 关键词 | Deflections of micro membranes and beams; Electrostatic sensors and actuators; Micro capillaries; Micro |
| 版次 | 2 |
| doi | https://doi.org/10.1007/978-3-662-47023-7 |
| isbn_softcover | 978-3-662-50733-9 |
| isbn_ebook | 978-3-662-47023-7Series ISSN 1865-0899 Series E-ISSN 1865-0902 |
| issn_series | 1865-0899 |
| copyright | Springer-Verlag Berlin Heidelberg 2015 |
发表于 2025-3-21 17:34:16
