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Titlebook: How Transistor Area Shrank by 1 Million Fold; Howard Tigelaar Book 2020 Springer Nature Switzerland AG 2020 History of Transistor Scaling.

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Wrap Up and What Is Next?,r powers, and new sensors continues. New scientific disciplines and new technologies enabled by ICs continue to be established and explored. Billions of ICs enable the lifestyle we take for granted. Today’s appliances, gadgets, and toys become obsolete and are replaced with a variety of new choices especially at Christmas time.
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The Incredible Shrinking IC: Part 4 BEOL Low-K Intermetal Dielectrics and Multilevel Copper Metalli smaller. The ability to form uniform barrier layers on the walls of via holes and metal trenches with ever increasing aspect ratio (narrower and deeper) drove the invention and development of new deposition processes and new deposition equipment and drove the introduction of new materials. 
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of how transistors work, how they are built, and the equipm.​This book explains in layman’s terms how CMOS transistors work.  The author explains step-by-step how CMOS transistors are built, along with an explanation of the purpose of each process step. He describes for readers the key inventions a
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The Incredible Shrinking IC: Part 1 Enabling Technologies,dvances in sensors for machine and process monitoring and control, control of fab environment, wafer cleaning technolgy, and particle removal technology could have and probably should have been included.
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nd developments in science and engineering that overcame huge obstacles, enabling engineers to shrink transistor area by over 1 million fold and build billions of transistor switches that switch over a billion times a second, all on a piece of silicon smaller than a thumbnail..978-3-030-40023-1978-3-030-40021-7
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