书目名称 | Gate Dielectrics and MOS ULSIs | 副标题 | Principles, Technolo | 编辑 | Takashi Hori | 视频video | | 概述 | The reader will obtain updated information for not only deep-submicron ULSIs having nanometer-range ultrathin gate- dielectrics but also nitrided oxides from this first book presenting them in detail | 丛书名称 | Springer Series in Electronics and Photonics | 图书封面 |  | 描述 | .Gate Dielectrics and MOS ULSIs .provides necessary and sufficient information for those who wish to know well and go beyond the conventional SiO2 gate dielectric. The topics particularly focus on dielectric films satisfying the superior quality needed for gate dielectrics even in large-scale integration. And since the quality requirements are rather different between device applications, they are selected in an applicatipn-oriented manner, e.g., conventional SiO2 used in CMOS logic circuits, nitrided oxides, which recently became indispensable for flash memories, and composite ONO and ferroelectric films for passive capacitors used in DRAM applications. The book also covers issues common to all gate dielectrics, such as MOSFET physics, evaluation, scaling, and device application/integration for successful development. The information is as up to date as possible, especially for nanometer-range ultrathin gate-dielectric films indispensible in submicrometer ULSIs. The text together with abundant illustrations will take even the inexperienced reader up to the present high state of the art. It is the first book presenting nitrided gate oxides in detail. | 出版日期 | Book 1997 | 关键词 | LSI; MIS; MOS; dielectrics; electron; ferroelectrics; hydrogen; nitride; oxide; semiconductor; spectroscopy | 版次 | 1 | doi | https://doi.org/10.1007/978-3-642-60856-8 | isbn_ebook | 978-3-642-60856-8Series ISSN 0172-5734 | issn_series | 0172-5734 | copyright | Springer-Verlag Berlin Heidelberg 1997 |
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