书目名称 | Epitaxy of Semiconductors |
副标题 | Introduction to Phys |
编辑 | Udo W. Pohl |
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概述 | Provides the essentials for a comprehensive graduate course on crystal growth of semiconductor heterostructures.Covers thermodynamics and kinetics of layer growth and major growth techniques.Gives det |
丛书名称 | Graduate Texts in Physics |
图书封面 |  |
描述 | Introduction to Epitaxy provides the essential information for a comprehensive upper-level graduate course treating the crystalline growth of semiconductor heterostructures. Heteroepitaxy represents the basis of advanced electronic and optoelectronic devices today and is considered one of the top fields in materials research. The book covers the structural and electronic properties of strained epitaxial layers, the thermodynamics and kinetics of layer growth, and the description of the major growth techniques metalorganic vapor phase epitaxy, molecular beam epitaxy and liquid phase epitaxy. Cubic semiconductors, strain relaxation by misfit dislocations, strain and confinement effects on electronic states, surface structures and processes during nucleation and growth are treated in detail. The Introduction to Epitaxy requires only little knowledge on solid-state physics. Students of natural sciences, materials science and electrical engineering as well as their lecturers benefit from elementary introductions to theory and practice of epitaxial growth, supported by pertinent references and over 200 detailed illustrations. |
出版日期 | Textbook 20131st edition |
关键词 | Crystal Structures; Epitaxy of Semiconductors; Liquid Phase Epitaxy; Materials for Optoelectronics; Meta |
版次 | 1 |
doi | https://doi.org/10.1007/978-3-642-32970-8 |
isbn_ebook | 978-3-642-32970-8Series ISSN 1868-4513 Series E-ISSN 1868-4521 |
issn_series | 1868-4513 |
copyright | Springer-Verlag Berlin Heidelberg 2013 |