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Titlebook: Emerging Technologies for In Situ Processing; Daniel J. Ehrlich,Van Tran Nguyen (Director) Book 1988 Martinus Nijhoff Publishers, Dordretc

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楼主: 厨房默契
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Laser Etching and Microelectronic Applications,in conventional lithography, the processes are relatively well understood, widely practiced, and many tools are commercially available. Some laser etching techniques require further process development and only a few industrial grade tools are commercially available at this time.
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Excimer Laser Patterning And Etching Of Metals,metal deposition for the direct writing of these tracks have been developed [1,2] and are gaining in importance, it may well be convenient and cost effective, where larger areas of metal are involved, to employ traditional surface metalisation techniques and to effect patterning by laser micro machining.
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Gestaltung und Design hybrider Teams,y, stringent requirements have been placed on layer thickness, layer composition and electrical, optical and mechanical properties. At present the only viable means for producing such layers is molecular beam epitaxy (MBE).
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New Work: Auf dem Weg zur neuen Arbeitsweltin conventional lithography, the processes are relatively well understood, widely practiced, and many tools are commercially available. Some laser etching techniques require further process development and only a few industrial grade tools are commercially available at this time.
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New and Developing Sources of Food Proteins: photoinduced modification of the resist, followed by development. Conventionally, the photon sources in projection systems have been mercury lamps, operating at 436 nm, and more recently at 405 nm and 365 nm (the G, H, and I lines, respectively, in the emission spectrum of Hg atoms) [1].
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https://doi.org/10.1007/978-1-4615-0296-8t induced decomposition mostly starts at 0.6 melting point (K). The usefulness of various inorganic systems, as resists, for x-ray masks, for local indiffusion sources and for metal inter-connects is noted
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