Titlebook: Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope; Huiliang Cao Book 2023 National Defense Industry Press 2023 Dual-mass.Quadrature

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Shuying Yu,Xian-Ling Mao,Wei Wei,Heyan HuangWith the in-depth development of silicon micromechanical gyroscope related technology, its structural noise has gradually become one of the main factors affecting its accuracy [106].

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Introduction,In the late 1980s, large scale and very large-scale integrated circuits appeared in the field of microelectronics science, making the integration of the circuit continuously improved, and the processing size is becoming smaller and smaller.

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Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Structure Noise Analysis and System Model,With the in-depth development of silicon micromechanical gyroscope related technology, its structural noise has gradually become one of the main factors affecting its accuracy [106].

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,Dual-Mass Linear Vibration Silicon Based MEMS Gyroscope Monitoring Circuit Design and Test TechnoloIn the form of analog circuit according to the analysis and related parameters of the drive circuit, detection interface, quadraturely coupled stiffness nulling circuit and PIPLC detection closed-loop circuit controller on the printed circuit board.

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,Temperature Influence on Silicon-Based MEMS Gyroscope and Suppression Method,icromachined gyroscope, and the influence not only occurs in the change of the working environment temperature of the gyroscope, but also the heat generated by the circuit of the micromachined gyroscope when the environment temperature is constant is enough to make the output signal of the gyroscope drift.

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