书目名称 | Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope | 编辑 | Huiliang Cao | 视频video | | 概述 | Records the dual-mass linear vibration silicon-based MEMS gyroscope in detail.Identifies "Post-Demographic Golden Age".Gives detailed descriptions of each research technology and optimization method | 图书封面 |  | 描述 | .This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding...It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.. | 出版日期 | Book 2023 | 关键词 | Dual-mass; Quadrature correction; Noise analysis; Measurement and control circuit; Temperature compensat | 版次 | 1 | doi | https://doi.org/10.1007/978-981-19-9247-6 | isbn_softcover | 978-981-19-9249-0 | isbn_ebook | 978-981-19-9247-6 | copyright | National Defense Industry Press 2023 |
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