Titlebook: CMOS Cantilever Sensor Systems; Atomic Force Microsc D. Lange,O. Brand,H. Baltes Book 2002 Springer-Verlag Berlin Heidelberg 2002 Atomic fo

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Conclusions and Outlook, They are fabricated utilizing IC technology and compatible micromachining, thus exploiting unique features such as cost effective batch fabrication and manufacturing with well established reliability. The cantilevers consist of single crystalline silicon and the dielectric layers from the CMOS process.

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Book 2002lopment of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for researchers on cantilever sensors and resonant sensors in general The reader will become familiar with the potential of the comb

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Patrice Hesto,Jean-Michel Lourtiozare mostly employed to detect the displacement of the cantilever probe. Especially when operating in vacuum or in a hostile environment the adjustment of the cantilever and the optical detector is time consuming. Furthermore, the exchange of a damaged probe is complicated.

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Force Sensors for Parallel Scanning Atomic Force Microscopy,are mostly employed to detect the displacement of the cantilever probe. Especially when operating in vacuum or in a hostile environment the adjustment of the cantilever and the optical detector is time consuming. Furthermore, the exchange of a damaged probe is complicated.

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Benedict A. San Jose,Kazuo Akagisitivity and resolution. The goal of this chapter is to develop a basic understanding of the dependency of the resonator characteristics on geometry and materials as well as potential excitation schemes and detection principles.

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Design Considerations,nowledge of spring constant, resonance frequency and corresponding quality factor of a cantilever sensor have to be taken into account to optimize sensitivity and resolution. The goal of this chapter is to develop a basic understanding of the dependency of the resonator characteristics on geometry a

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Cantilever Beam Resonators,and affects a characteristic of the oscillation of a solid structure. In most resonant sensors a change of the resonance frequency is detected, but also vibration amplitude, phase and quality factor are used as output signals. The advantage of resonant sensors compared to analog sensors is that the

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Force Sensors for Parallel Scanning Atomic Force Microscopy,nstrument utilized in several areas of research as well as in industrial applications, e.g. for quality control. These instruments have improved in quality and usability significantly over the last decade. Still, the drawback of commercially available AFM systems is their low throughput due to the s