| 书目名称 | CMOS Cantilever Sensor Systems |
| 副标题 | Atomic Force Microsc |
| 编辑 | D. Lange,O. Brand,H. Baltes |
| 视频video | http://file.papertrans.cn/221/220332/220332.mp4 |
| 概述 | This book describes a vital measuring principle for analysing integrated circuits with a nano-electro-mechanical system.Includes supplementary material: |
| 丛书名称 | Microtechnology and MEMS |
| 图书封面 |  |
| 描述 | This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for researchers on cantilever sensors and resonant sensors in general The reader will become familiar with the potential of the combination of two technological approaches: IC fabrication technology, notably CMOS technology, and silicon micromachining and the resulting microstructures such as cantilever beams. It was recognized early that these two technologies should be merged in order to make the microstructures smart and devise integrated microsystems with on-chip driving and signal conditioning circuitry - now known as CMOS MEMS or, with the arrival of nanostructures, CMOS NEMS. One way to achieve the merger is the post-processing micro- or nano- machining of finished CMOS wafers, some of which is described in this book. The book introduces this approach based on work carried out at the Physical Electronics Laboratory of ETH Zurich on arrays of cantilever transducer |
| 出版日期 | Book 2002 |
| 关键词 | Atomic force microscopy; CMOS compatible micromachining; Cantilever; Chemical sensors; Sensor; Sensors; mi |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-3-662-05060-6 |
| isbn_softcover | 978-3-642-07728-9 |
| isbn_ebook | 978-3-662-05060-6Series ISSN 1615-8326 Series E-ISSN 2365-0680 |
| issn_series | 1615-8326 |
| copyright | Springer-Verlag Berlin Heidelberg 2002 |
|Archiver|手机版|小黑屋|
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