| 书目名称 | CCD Image Sensors in Deep-Ultraviolet |
| 副标题 | Degradation Behavior |
| 编辑 | Flora M. Li,Arokia Nathan |
| 视频video | |
| 概述 | The first book to integrate CCD image sensor characteristics, their intrinsic instabilities, and the effect of UV radiation on device characteristics |
| 丛书名称 | Microtechnology and MEMS |
| 图书封面 |  |
| 描述 | .As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.. |
| 出版日期 | Book 2005 |
| 关键词 | CCD image sensor; Deep-UV damage mechanisms; Eximer laser; Photodiode; Sensor; UV photodiodes; design; imag |
| 版次 | 1 |
| doi | https://doi.org/10.1007/b139047 |
| isbn_softcover | 978-3-642-06152-3 |
| isbn_ebook | 978-3-540-27412-4Series ISSN 1615-8326 Series E-ISSN 2365-0680 |
| issn_series | 1615-8326 |
| copyright | Springer-Verlag Berlin Heidelberg 2005 |
发表于 2025-3-21 18:50:27
