Titlebook: Auger- and X-Ray Photoelectron Spectroscopy in Materials Science; A User-Oriented Guid Siegfried Hofmann Book 2013 Springer-Verlag Berlin H

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Introduction and Outline,easy elemental identification and the detection of chemical bonds, and they are principally nondestructive. Furthermore, particularly in AES, an outstanding spatial resolution and, in XPS, a high energy-resolution enable mapping of elements and of chemical states. AES and XPS can be easily combined

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0931-5195 ayer structures in practical cases (e.g. contamination, evaporation, segregation and oxidation) are used to critically review diff978-3-642-43173-9978-3-642-27381-0Series ISSN 0931-5195 Series E-ISSN 2198-4743

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https://doi.org/10.1007/978-3-662-52893-8In this way, the angle of incidence of the primary photons or electrons and the angle of emission of Auger- or photoelectrons can be varied (Sects. 5.1 and 5.2). This variation cannot only be used to find optimum signal intensity but also to provide nondestructive depth profiles by angle-resolved XPS (AR-XPS) and AES (AR-AES) (see Sect. 7.2.1).

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Generic Programming with Dependent Types,ious distortions). Because of their relatively moderate matrix effects, AES and XPS in combination with argon ion bombardment have become the most popular tool for depth profiling of major components in thin films, with a clear preference of AES depth profiling as explained in Sect. 7.1.6.

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Quantitative Analysis (Data Evaluation), for AES, quantification of intensities in terms of atomic concentrations is only possible by knowledge of the in-depth distribution of composition, with the limiting cases of homogeneous distribution and of thin atomic layer(s) on a substrate.

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Optimizing Measured Signal Intensity: Emission Angle, Incidence Angle and Surface Roughness,In this way, the angle of incidence of the primary photons or electrons and the angle of emission of Auger- or photoelectrons can be varied (Sects. 5.1 and 5.2). This variation cannot only be used to find optimum signal intensity but also to provide nondestructive depth profiles by angle-resolved XPS (AR-XPS) and AES (AR-AES) (see Sect. 7.2.1).

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