Titlebook: An Introduction to Surface-Micromachining; Robert W. Johnstone,M. Parameswaran Book 2004 Springer Science+Business Media New York 2004 LIG

归功于

Bernd Beckert,Peter Zoche,Hardy DreierBefore addressing the manufacturing technologies used in micromachining, the individual processing steps will be covered. The techniques described in this chapter provide the foundation upon which complete fabrication processes for micromachining. are based.

勋章

MIR

多山

杀虫剂

Microfabrication ProcessesBefore addressing the manufacturing technologies used in micromachining, the individual processing steps will be covered. The techniques described in this chapter provide the foundation upon which complete fabrication processes for micromachining. are based.

灯丝

Corporeal

aesthetician

intuition

Introductionmanufacturing processes. They should then build upon this knowledge by learning the basic design techniques used in surface-micromachining. Finally, new designers should learn any specific device knowledge and theory required. Figure 1.1 outlines this hierarchy.

杀人

Micromachining Technologieseen miniaturized. However, many types of systems may be miniaturized. In particular, mechanical systems can be miniaturized as well. These miniature devices can be called micromachines, and fabricating micromachines can be called micromachining.