Titlebook: An Introduction to Surface-Micromachining; Robert W. Johnstone,M. Parameswaran Book 2004 Springer Science+Business Media New York 2004 LIG

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building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. .An Introduction to Surface-Micromachining. connects the manufacturing process, microscale phenomena, and design data to physical form and f

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Design Techniquesachined devices and the substrate. If the attractive force is strong enough, the device will be pulled down to the substrate surface. Even if the device does not adhere, significant friction will be present.

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unction. .This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.978-1-4757-1077-9978-1-4020-8021-0