期刊全称 | A Practical Guide to Surface Metrology | 影响因子2023 | Michael Quinten | 视频video | | 发行地址 | Offers advice on the advantages and disadvantages of various optical and non-optical metrology techniques in different situations.Describes best practice and gives genuine real-world examples and case | 学科分类 | Springer Series in Measurement Science and Technology | 图书封面 |  | 影响因子 | .This book offers a genuinely practical introduction to the most commonly encountered optical. .and non.-.optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the user to select the best approach in a given context..Most methods in surface metrology are based upon the interaction of light or electromagnetic radiation (UV, NIR, IR), and different optical effects are utilized to get a certain optical response from the surface; some of them record only the intensity reflected or scattered by the surface, others use interference of EM waves to obtain a characteristic response from the surface. The book covers techniques ranging from microscopy (including confocal, SNOM and digital holographic microscopy) through interferometry (including white light, multi-wavelength, grazing incidence and shearing) to spectral reflectometry andellipsometry. The non-optical methods comprise tactile methods (stylus tip, AFM) as well as capacitive and inductive methods (capacitive sensors, eddy current sensors)..The book provides:...Overview of the working principl | Pindex | Book 2019 |
The information of publication is updating
|
|