Titlebook: A Practical Guide to Surface Metrology; Michael Quinten Book 2019 The Editor(s) (if applicable) and The Author(s), under exclusive license

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Mannigfaltigkeiten und Differentialformen, matter is manifold. Therefore, it seems appropriate to have first an introduction into the physical basics of optics and optical sensors. This Chapter concentrates on the physical properties of electromagnetic waves, the basic interactions of light with matter, and on optical material properties. F

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https://doi.org/10.1007/978-3-7643-7480-8with the surface of the workpiece. State-of-the-art camera technology, proper attention to the internal optical design, light sources, and computing capabilities have led to impressive optical metrology systems with considerable specifications. The most relevant techniques are discussed in the follo

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A Practical Guide to Surface Metrology978-3-030-29454-0Series ISSN 2198-7807 Series E-ISSN 2198-7815

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https://doi.org/10.1007/978-3-7643-8884-3ylus tip measurement as well as atomic force microscopy. Tactile surface profiling is approved since many decades as a reliable dimensional measuring technique. Atomic force microscopy is used in research, development, and quality assurance whenever high-resolution measurements of the surface structures are demanded.

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https://doi.org/10.1007/978-3-7643-7480-8 deviations, position deviations and defect inspection can be accomplished by these methods. More common is to use imaging and image processing as the main processes for measurement and evaluation for these more coarse deviations..This chapter comprises the following imaging methods:

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