Overview: Provides a comprehensive summary of micro/nano technology in fabrications.Contributors, including both editors and authors, are the world class experts in their research areas with remarkable and prosThis handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will p
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