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Titlebook: Micro Electro Mechanical Systems; Qing-An Huang Living reference work 20200th edition Micro fluid.RF MEMS.actuators.bio MEMS.sensors

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发表于 2025-3-21 17:19:56 | 显示全部楼层 |阅读模式
书目名称Micro Electro Mechanical Systems
编辑Qing-An Huang
视频video
概述Provides a comprehensive summary of micro/nano technology in fabrications.Contributors, including both editors and authors, are the world class experts in their research areas with remarkable and pros
丛书名称Micro/Nano Technologies
图书封面Titlebook: Micro Electro Mechanical Systems;  Qing-An Huang Living reference work 20200th edition  Micro fluid.RF MEMS.actuators.bio MEMS.sensors
描述This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will provide a solid knowledge background and inspire innovations in this highly interdisciplinary field..The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are inv
出版日期Living reference work 20200th edition
关键词Micro fluid; RF MEMS; actuators; bio MEMS; sensors
doihttps://doi.org/10.1007/978-981-10-2798-7
isbn_ebook978-981-10-2798-7
issn_series 2522-5065
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书目名称Micro Electro Mechanical Systems读者反馈学科排名




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A Microwave Power Sensor,These sensors meet the characteristics of high performance and low cost. They can be used as implant devices and embedded in microwave communication and radar systems, such as the self-detection of the transceiver module and the measurement of leakage power in microwave module circuits. The MEMS mic
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发表于 2025-3-22 09:13:17 | 显示全部楼层
Electrode Array for Neural Interfaces,ding working principle, material selection, structure, and manufacturing process of neural microelectrode device. At last, we will sum up the problems and challenges microelectrode devices are facing.
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发表于 2025-3-22 18:06:59 | 显示全部楼层
High Temperature Silicon Pressure Sensors,equency, in order to take full use of elastic strain energy induced by structure deformation. Then, lithography masks for corresponding pattern structures were presented. Followed by the lithography mask designing, the fabrication process of sensor chip was presented. Fourthly, the packaging technol
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发表于 2025-3-23 02:56:49 | 显示全部楼层
MEMS Piezoelectric Vibration Energy Harvesters,hallenges previous literature suggestion that lower damping ratio tends to higher power output. Finally, the typical microfabrication of MEMS based piezoelectric energy harvesters was described and the challenges of the MEMS PVEH were illustrated.
发表于 2025-3-23 09:30:15 | 显示全部楼层
Living reference work 20200th editionrs to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are inv
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