Titlebook: VLSI Design for Manufacturing: Yield Enhancement; Stephen W. Director,Wojciech Maly,Andrzej J. Stroj Book 1990 Kluwer Academic Publishers

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Parametric Yield Maximization,ider choosing a nominal design point that maximizes the number of circuits which meet a given performance specification. This approach to yield maximization is called .. Prior to 1977, Monte Carlo methods [48], [28], albeit crude and expensive, had been the technique primarily used for design center

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Statistical Process Simulation,be supported by statistical process and device simulation. It will also be demonstrated in the following chapters of this book that such simulation is a necessary ingredient not only for circuit design but also for process and device development, as well as IC process diagnosis and control. This cha

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Computer-Aided Manufacturing,a Computer Aided Manufacturing system that can be used to monitor, diagnose and control IC manufacturing. We formulate the task of process control as one of profit maximization and develop the associated objective function and the constraints for a number of manufacturing scenarios.

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0893-3405 with sufficient yield to be profitable. There are two ways to increase yield: by improving the control of the manufacturing process and by designing the process and the circuits in such a way as to minimize the effect of the inherent variations of the process on performance. The latter is typically

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