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Titlebook: Transport Simulation in Microelectronics; Alfred Kersch,William J. Morokoff Book 1995 Birkhäuser Verlag 1995 Computer Engineering.Festkörp

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书目名称Transport Simulation in Microelectronics
编辑Alfred Kersch,William J. Morokoff
视频video
丛书名称Progress in Numerical Simulation for Microelectronics
图书封面Titlebook: Transport Simulation in Microelectronics;  Alfred Kersch,William J. Morokoff Book 1995 Birkhäuser Verlag 1995 Computer Engineering.Festkörp
描述Computer simulation of semiconductor processing equipment and devices requires the use of a wide variety of numerical methods. Of these methods, the Monte Carlo approach is perhaps most fundamentally suited to mod­ eling physical events occurring on microscopic scales which are intricately connected to the particle structure of nature. Here physical phenomena can be simulated by following simulation particles (such as electrons, molecules, photons, etc. ) through a statistical sampling of scattering events. Monte Carlo is, however, generally looked on as a last resort due to the extremely slow convergence of these methods. It is of interest, then, to examine when in microelectronics it is necessary to use Monte Carlo methods, how such methods may be improved, and what are the alternatives. This book ad­ dresses three general areas of simulation which frequently arise in semicon­ ductor modeling where Monte Carlo methods playa significant role. In the first chapter the basic mathematical theory of the Boltzmann equation for particle transport is presented. The following chapters are devoted to the modeling of the transport processes and the associated Monte Carlo meth­ ods. Specific
出版日期Book 1995
关键词Computer Engineering; Festkörperphysik; Microelectronics; Monte Carlo Methods; angewandte Mathematik; mod
版次1
doihttps://doi.org/10.1007/978-3-0348-9080-9
isbn_softcover978-3-0348-9898-0
isbn_ebook978-3-0348-9080-9
copyrightBirkhäuser Verlag 1995
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