书目名称 | The Physics of Micro/Nano-Fabrication | 编辑 | Ivor Brodie,Julius J. Muray | 视频video | | 丛书名称 | Microdevices | 图书封面 |  | 描述 | In this revised and expanded edition, the authors provide acomprehensive overview of the tools, technologies, and physical modelsneeded to understand, build, and analyze microdevices. Students,specialists within the field, and researchers in related fields willappreciate their unified presentation and extensive references. | 出版日期 | Book 1992 | 关键词 | chemistry; optics; physics; research | 版次 | 1 | doi | https://doi.org/10.1007/978-1-4757-6775-9 | isbn_softcover | 978-1-4419-3221-1 | isbn_ebook | 978-1-4757-6775-9 | copyright | Springer Science+Business Media New York 1992 |
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