| 书目名称 | Subsecond Annealing of Advanced Materials |
| 副标题 | Annealing by Lasers, |
| 编辑 | Wolfgang Skorupa,Heidemarie Schmidt |
| 视频video | |
| 概述 | Written by leading researchers in the field.Describes annealing-related processes in semiconductor technology.Includes a broad range of examples.Includes supplementary material: |
| 丛书名称 | Springer Series in Materials Science |
| 图书封面 |  |
| 描述 | The thermal processing of materials ranges from few fem to seconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing. This book offers after an historical excursus selected contributions on fundamental and applied aspects of thermal processing of classical elemental semiconductors and other advanced materials including nanostructures with novel optoelectronic, magnetic, and superconducting properties. Special emphasis is given on the diffusion and segregation of impurity atoms during thermal treatment. A broad range of examples describes the solid phase and/or liquid phase processing of elemental and compound semiconductors, dielectric composites and organic materials. |
| 出版日期 | Book 2014 |
| 关键词 | Activation of Dopants; Annealing by Swift Heavy Ions; Epitaxial Growth of Silicon; Explosive Crystallis |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-3-319-03131-6 |
| isbn_softcover | 978-3-319-35287-9 |
| isbn_ebook | 978-3-319-03131-6Series ISSN 0933-033X Series E-ISSN 2196-2812 |
| issn_series | 0933-033X |
| copyright | Springer International Publishing Switzerland 2014 |
发表于 2025-3-21 19:57:56
