Titlebook: Soziale Politik - Soziale Lage - Soziale Arbeit; Benjamin Benz,Jürgen Boeckh,Hildegard Mogge-Grotja Book 2011 VS Verlag für Sozialwissensc

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Benjamin Benz,Jürgen Boeckh,Hildegard Mogge-Grotjahn the mold, is different from a mask for photolithography. The template material and geometrical parameters directly affect the template deformation and the quality of transfer pattern. Alignment accuracy is determined by the mark pattern on the master; also, the pattern transfer resolution is affect

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