Titlebook: Smart Sensors and MEMS; Proceedings of the N Sergey Y. Yurish,Maria Teresa S. R. Gomes Conference proceedings 2004 Springer Science+Busines

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Micro-Hall Magnetic Sensors: Physics, Technologies and Applications, phenomena in such micro-devices are described. Scaling down the dimensions of a Hall plate, the prevailing mechanism of electron transport changes. In macroscopic devices stationary transport takes place. Depending on the device size and applied voltage, the drift velocity of carriers may be linear

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Modern Silicon-based MEMS Technology,to the specific demands for MEMS, there are special processes needed for MEMS devices. In this chapter, after reviewing general aspects of microtechnology some of the specific MEMSprocesses will be discussed, e.g. bulk-micromachining, surface micromachining, DRIE and SOI-technology..Keywords: MEMS,

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Chemical and Biological Sensors Based on Microcantilevers,hanical energy and are based primarily on mechanical phenomena. As a result, an innovative family of chemical and biological sensors has emerged. In this work we discuss the recent advances in cantilever transducers. While MEMS represents a diverse family of designs, devices with simple cantilever c

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Uncooled Infrared MEMS Detectors,f such devices and compare various FPAs, it is essential to have an in-depth understanding of their operation, figures of merit, and fundamental limitations. We give an overview of figures of merit that are applicable to both cooled and uncooled IR detectors. Specific focus of this chapter is a perf

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Electronic Biosensors Based on Biomaterial-Nanoparticle Hybrid Systems,, antigens, antibodies) or DNA. The integration of the nanoparticles, exhibiting unique electronic, photonic and catalytic properties, with the biomaterials, revealing unique recognition features or catalytic properties, yields novel hybrid nanobiomaterials of synergetic properties and functions. Th

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