Titlebook: Semiconductors; Part I William Marvin Coughran,Julian Cole,Jacob K. White Conference proceedings 1994 Springer-Verlag New York, Inc. 1994 a

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The IMA Volumes in Mathematics and its Applicationshttp://image.papertrans.cn/s/image/864911.jpg

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IC Technology CAD Overviewuits. Recent trends in the integration of process, device, and circuit simulation tools, and the current emergence of UNIX based computing environments of networked workstations make possible user-friendly, task-based CAD systems for technology optimization, characterization, and cell design.

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Switched Networksl inversion of the Laplace transform was developed. It is equivalent to a high-order integration and can handle inconsistent initial conditions, discontinuous functions and Dirac impulses. The method was used to write programs for analysis of switched networks.

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The Boltzmann-Poisson System in Weakly Collisional Sheathse shown to be in good agreement with results from Monte Carlo simulations. A detailed knowledge of the angular and energy distribution of the ion flux impinging on a surface is of interest in the plasma-processing of semiconductor materials.

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An Interface Method for Semiconductor Process Simulation described. Details are given of the methods used to specify and manipulate curves, and to define arbitrary simply connected regions by their boundary curves. Numerical experiments are presented comparing the divided difference and TR/TR methods for dynamically adjusting the timestep, and comparing Newton and Newton-Richardson iteration.