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Titlebook: Rare Earth Oxide Thin Films; Growth, Characteriza Marco Fanciulli,Giovanna Scarel Book 2007 Springer-Verlag Berlin Heidelberg 2007 Depositi

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书目名称Rare Earth Oxide Thin Films
副标题Growth, Characteriza
编辑Marco Fanciulli,Giovanna Scarel
视频video
概述State-of-the-art contributions of experts in the field of emerging materials (rare earth oxides) for microelectronics, nanoscience, spintronics, optoelectronics, and related technologies.Includes supp
丛书名称Topics in Applied Physics
图书封面Titlebook: Rare Earth Oxide Thin Films; Growth, Characteriza Marco Fanciulli,Giovanna Scarel Book 2007 Springer-Verlag Berlin Heidelberg 2007 Depositi
描述.Thin rare earth (RE) oxide films are emerging materials for microelectronic, nanoelectronic, and spintronic applications. The state-of-the-art of thin film deposition techniques as well as the structural, physical, chemical, and electrical properties of thin RE oxide films and of their interface with semiconducting substrates are discussed. The aim is to identify proper methodologies for the development of RE oxides thin films and to evaluate their effectiveness as innovative materials in different applications..
出版日期Book 2007
关键词Deposition methods; EELS; Experiment; High-k dielectrics; Microelectronics; PED; REM; Rare earth oxides; mic
版次1
doihttps://doi.org/10.1007/b137342
isbn_softcover978-3-642-07146-1
isbn_ebook978-3-540-35797-1Series ISSN 0303-4216 Series E-ISSN 1437-0859
issn_series 0303-4216
copyrightSpringer-Verlag Berlin Heidelberg 2007
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