Titlebook: RF MEMS Switches and Integrated Switching Circuits; Ai-Qun Liu Book 2010 Springer Science+Business Media, LLC 2010 Filter.MEMS.RF MEMS.RF

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Substrate Transfer Process,In this chapter, a single-mask substrate transfer process for fabrication of high-aspect-ratio (HAR) suspended structures is presented [1–3]. The HAR silicon structures are fabricated using deep reactive ion etching (DRIE) technique and then transferred to a glass wafer though silicon/thin film/glass anodic bonding and silicon thinning techniques.

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Ai-Qun LiuPresents RF Switches and switching circuit MEMS devices in a unified framework covering all aspects of engineering innovation, design, modeling, fabrication, control and experimental implementation.Di

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Introduction, a comprehensive range of RF MEMS topics. Highlights of contributions include areas such as (1) lateral series switches, (2) capacitive shunt switches, (3) coplanar waveguide transmission line switches, (4) multi-throw switches, (5) tunable electromagnetic bandstop and bandpass filters, (6) capaciti

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Capacitive Shunt Switches,ic layer and the metal layer, which is due to charge injection and charge trapping in the dielectric layer. Power handling is another important concern for the applications of the capacitive switch. For the capacitive shunt switch, it is easier to handle less than 1 W RF power for billions of cycles

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Coplanar Waveguide Transmission Line, designed, fabricated, and experimented. Then, attenuation related to different substrate materials, core materials, and fabrication processes are analyzed. The experimental results show that the Si-core CPW supports quasi-TEM mode propagation up to 25 GHz with attenuation less than 4 dB/cm.

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Tunable Electromagnetic Band Gap Bandstop Filter,able EBG filters are discussed. These new CPW EBG structures include an unloaded and a loaded design. The frequency characteristics of the EBG are demonstrated using different circuit parameters. An equivalent circuit model for the unloaded and loaded unit structures is derived and a dispersion diag

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