| 书目名称 | Precision Nanometrology |
| 副标题 | Sensors and Measurin |
| 编辑 | Wei Gao |
| 视频video | |
| 概述 | Presents the techniques and basics of precision nanotechnology for nanoscale manufacturing.Includes methods for reducing Abbe errors in various systems.Describes applications of nanoscale motion-contr |
| 丛书名称 | Springer Series in Advanced Manufacturing |
| 图书封面 |  |
| 描述 | Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines.The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include:• error separation algorithms and systems for measurement of straightness and roundness,• the measurement of micro-aspherics,• systems based on scanning probe microscopy, and• scanning image-sensor systems.Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing. |
| 出版日期 | Book 2010 |
| 关键词 | Laser; REM; STEM; algorithm; instruments; linear optimization; metrology; nanometrology; nanotechnology; semi |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-1-84996-254-4 |
| isbn_softcover | 978-1-4471-5743-4 |
| isbn_ebook | 978-1-84996-254-4Series ISSN 1860-5168 Series E-ISSN 2196-1735 |
| issn_series | 1860-5168 |
| copyright | Springer-Verlag London 2010 |
发表于 2025-3-21 19:22:00
