| 书目名称 | Plasma-Surface Interactions and Processing of Materials |
| 编辑 | Orlando Auciello,Alberto Gras-Marti,Daniel L. Flam |
| 视频video | |
| 丛书名称 | NATO Science Series E: |
| 图书封面 |  |
| 描述 | An understanding of the processes involved in the basic andapplied physics and chemistry of the interaction of plasmas withmaterials is vital to the evolution of technologies such as thoserelevant to microelectronics, fusion and space. .The subjects dealt with in the book include: the physics and chemistryof plasmas, plasma diagnostics, physical sputtering and chemicaletching, plasma assisted deposition of thin films, ion and electronbombardment, and plasma processing of inorganic and polymericmaterials. .The book represents a concentration of a substantial amount ofknowledge acquired in this area - knowledge which was hithertowidely scattered throughout the literature - and thusestablishes a baseline reference work for both established and tyroresearch workers. |
| 出版日期 | Book 1990 |
| 关键词 | Polymer; RSI; alloy; crystal; diffraction; electron diffraction; modeling; spectroscopy; structural analysis |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-94-009-1946-4 |
| isbn_softcover | 978-94-010-7369-1 |
| isbn_ebook | 978-94-009-1946-4Series ISSN 0168-132X |
| issn_series | 0168-132X |
| copyright | Kluwer Academic Publishers 1990 |
发表于 2025-3-21 18:45:08
