| 书目名称 | Photonic Waveguide Components on Silicon Substrate |
| 副标题 | Modeling and Experim |
| 编辑 | Swagata Samanta,Pallab Banerji,Pranabendu Ganguly |
| 视频video | |
| 概述 | Discusses fabrication processes of waveguides with polymer on silicon dioxide.Illustrates the micro-modification of waveguide structures using FIB lithography.Presents a computationally inexpensive th |
| 丛书名称 | SpringerBriefs in Applied Sciences and Technology |
| 图书封面 |  |
| 描述 | This book focuses on the design and development of SU-8 polymer and silicon waveguide-based devices using the effective index based matrix method. Various fabrication techniques like laser direct writing (LDW), Focused Ion Beam (FIB) and optical lithography are discussed. FIB lithography has been explored for photonic-crystal structures on the waveguide and for directional coupler in coupled region. This technique is shown to be suitable in fabricating photonic crystal structures as well as for making any precise modifications in micro- and nano-meter photonic waveguide structures. This book can be a useful reference for students, researchers, and fabrication engineers working in the areas of integrated optics, optical communications, laser technology and optical lithography for device manufacturing. . |
| 出版日期 | Book 2020 |
| 关键词 | Waveguides; Silicon; SU-8 Polymer; Photonic Devices; Power Splitter; Micro Ring Resonator; Photonic Crysta |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-981-15-1311-4 |
| isbn_softcover | 978-981-15-1310-7 |
| isbn_ebook | 978-981-15-1311-4Series ISSN 2191-530X Series E-ISSN 2191-5318 |
| issn_series | 2191-530X |
| copyright | The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2020 |
发表于 2025-3-21 17:35:00
