| 书目名称 | Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators | | 编辑 | Gerhard Lammel,Sandra Schweizer,Philippe Renaud | | 视频video | | | 丛书名称 | Microsystems | | 图书封面 |  | | 描述 | .Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators. shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly...An advanced microscanning device capable of one- and two-dimensional scanning can be integrated in a compact barcode scanning system composed of a laser diode and adapted optics. The original design of the microscanner combines efficiently the miniaturized thermal mechanical actuator and the reflecting mirror, providing a one-dimensional scanning or an unique combination of two movements, depending on the geometry. The simplicity of the device makes it a competitive component...The authors rethink the design of a miniaturized optical device and find a compact solution for a microspectrometer, based on a tunable filter and a single pixel detector. A porous silicon technology combines efficiently the optical filter function with | | 出版日期 | Book 2002 | | 关键词 | architecture; calibration; design; filter; laser; laser diode; microsystems; optics; packaging; simulation; sp | | 版次 | 1 | | doi | https://doi.org/10.1007/978-1-4757-6083-5 | | isbn_softcover | 978-1-4419-4946-2 | | isbn_ebook | 978-1-4757-6083-5Series ISSN 1389-2134 | | issn_series | 1389-2134 | | copyright | Springer Science+Business Media New York 2002 |
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发表于 2025-3-21 19:34:09
