| 书目名称 | Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals |
| 编辑 | Daniel Montero Álvarez |
| 视频video | http://file.papertrans.cn/663/662298/662298.mp4 |
| 概述 | Nominated as an outstanding Ph.D. thesis by the Universidad Complutense de Madrid, Madrid, Spain.Provides basic research in a novel material based on silicon, which is later integrated into an industr |
| 丛书名称 | Springer Theses |
| 图书封面 |  |
| 描述 | .This thesis makes a significant contribution to the development of cheaper Si-based Infrared detectors, operating at room temperature. In particular, the work is focused in the integration of the Ti supersaturated Si material into a CMOS Image Sensor route, the technology of choice for imaging nowadays due to its low-cost and high resolution. First, the material is fabricated using ion implantation of Ti atoms at high concentrations. Afterwards, the crystallinity is recovered by means of a pulsed laser process. The material is used to fabricate planar photodiodes, which are later characterized using current-voltage and quantum efficiency measurements. The prototypes showed improved sub-bandgap responsivity up to 0.45 eV at room temperature. The work is further supported by a collaboration with STMicroelectronics, where the supersaturated material was integrated into CMOS-based sensors at industry level. The results show that Ti supersaturated Si is compatible in terms of contamination, process integration and uniformity. The devices showed similar performance to non-implanted devices in the visible region. This fact leaves the door open for further integration of supersaturated ma |
| 出版日期 | Book 2021 |
| 关键词 | Infrared Cmos Image Sensor; Sub-bandgap Absorption Silicon; Supersaturated Silicon; Nanosecond Laser An |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-3-030-63826-9 |
| isbn_softcover | 978-3-030-63828-3 |
| isbn_ebook | 978-3-030-63826-9Series ISSN 2190-5053 Series E-ISSN 2190-5061 |
| issn_series | 2190-5053 |
| copyright | The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Switzerl |
|Archiver|手机版|小黑屋|
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