| 书目名称 | Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals | | 编辑 | Daniel Montero Álvarez | | 视频video | | | 概述 | Nominated as an outstanding Ph.D. thesis by the Universidad Complutense de Madrid, Madrid, Spain.Provides basic research in a novel material based on silicon, which is later integrated into an industr | | 丛书名称 | Springer Theses | | 图书封面 |  | | 描述 | .This thesis makes a significant contribution to the development of cheaper Si-based Infrared detectors, operating at room temperature. In particular, the work is focused in the integration of the Ti supersaturated Si material into a CMOS Image Sensor route, the technology of choice for imaging nowadays due to its low-cost and high resolution. First, the material is fabricated using ion implantation of Ti atoms at high concentrations. Afterwards, the crystallinity is recovered by means of a pulsed laser process. The material is used to fabricate planar photodiodes, which are later characterized using current-voltage and quantum efficiency measurements. The prototypes showed improved sub-bandgap responsivity up to 0.45 eV at room temperature. The work is further supported by a collaboration with STMicroelectronics, where the supersaturated material was integrated into CMOS-based sensors at industry level. The results show that Ti supersaturated Si is compatible in terms of contamination, process integration and uniformity. The devices showed similar performance to non-implanted devices in the visible region. This fact leaves the door open for further integration of supersaturated ma | | 出版日期 | Book 2021 | | 关键词 | Infrared Cmos Image Sensor; Sub-bandgap Absorption Silicon; Supersaturated Silicon; Nanosecond Laser An | | 版次 | 1 | | doi | https://doi.org/10.1007/978-3-030-63826-9 | | isbn_softcover | 978-3-030-63828-3 | | isbn_ebook | 978-3-030-63826-9Series ISSN 2190-5053 Series E-ISSN 2190-5061 | | issn_series | 2190-5053 | | copyright | The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Switzerl |
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发表于 2025-3-21 16:17:18
