Titlebook: Nanoscale Sensors; Shibin Li,Jiang Wu,Yadong Jiang Book 2013 Springer International Publishing Switzerland 2013 BioFET-SIM.Biosensors.Bolo

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Ultrasensitive In-Plane Resonant Nano-electromechanical Sensors,detection principle. The simplified NEM sensor consists of a clamped-clamped (CC) beam with two side electrodes, in-plane resonant NEM (IP-RNEM) sensor. Later, the IP-RNEM sensor is monolithically integrated with an in-plane field-effect-transistor (FET) to realize the in-plane resonant suspended ga

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