| 书目名称 | Nanofabrication | | 副标题 | Principles, Capabili | | 编辑 | Zheng Cui | | 视频video | | | 概述 | Compares nanofabrication technologies, including their capabilities and limitations, in a consistent, reader-friendly manner.Contains in-depth discussions on optical lithography and electron beam lith | | 图书封面 |  | | 描述 | This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges. | | 出版日期 | Book 20172nd edition | | 关键词 | Additive nanomanufacturing; Electron beam lithography; Nanofabrication; Nanoimprinting; Nanoscale patter | | 版次 | 2 | | doi | https://doi.org/10.1007/978-3-319-39361-2 | | isbn_softcover | 978-3-319-81875-7 | | isbn_ebook | 978-3-319-39361-2 | | copyright | Springer International Publishing Switzerland 2017 |
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发表于 2025-3-21 17:55:16
