| 书目名称 | Nanofabrication | | 副标题 | Principles, Capabili | | 编辑 | Zheng Cui | | 视频video | | | 概述 | Contains most of the nanofabrication techniques encountered in both industrial applications and scientific research.Presents less theoretical and more practical information and examples from the autho | | 图书封面 |  | | 描述 | .Nanofabrication: Principles, Capabilities, and Limits. provides a practical guide to nanofabrication technologies and processes. It was first published in 2008 and is now in an updated third edition. The book introduces readers to the fundamentals and recent developments in nanofabrication techniques, with chapters covering optical lithography, electron beam lithography, and nanoimprinting lithography, as well as nanofabrication by focused ion beams, scanning tips, self-assembly, and nanoscale pattern transfer by etching and deposition. There is also a chapter describing various tricks that enable the fabrication of nanostructures that would otherwise be impossible using traditional methods. The unique feature of this book is that each technique introduced is not only about its capabilities but also its limits so that the readers are fully aware of the best options to choose from a toolbox of nanofabrication processes covered in the book.. | | 出版日期 | Book 2024Latest edition | | 关键词 | Additive nanomanufacturing; Electron beam lithography; Indirect nanofabrication; Microfabrication; Nanof | | 版次 | 3 | | doi | https://doi.org/10.1007/978-3-031-62546-6 | | isbn_softcover | 978-3-031-62548-0 | | isbn_ebook | 978-3-031-62546-6 | | copyright | The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Switzerl |
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发表于 2025-3-21 18:41:41
