Titlebook: Nano-tribology and Materials in MEMS; Sujeet K. Sinha,N. Satyanarayana,Seh Chun Lim Book 2013 Springer-Verlag Berlin Heidelberg 2013 MEMS

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Friction and Wear Studies of Ultra-Thin Functionalized Polyethylene Film Chemisorbed on Si with an phenone (Ph.CO) layer is presented in this chapter. The wear durability results obtained under 40 mN applied load and 0.052 m/s sliding speed show an improvement in the wear life of Si/Ph.CO/fPE by one order of magnitude over Si/Ph.CO. When perfluoropolyether (PFPE) is applied as a top mobile lubric

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Localized Lubrication of Micromachines: A Novel Method of Lubrication on Micromechanical Devices,ilable designs and mechanisms in such machines to mostly non-contacting ones. Silicon (Si) is a common material for fabrication of MEMS devices, which has very poor tribological properties (high wear rates and coefficient of friction). MEMS lubrication techniques usually involve highly expensive and

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