书目名称 | Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals | 编辑 | Orlando Auciello,Jürgen Engemann | 视频video | | 丛书名称 | NATO Science Series E: | 图书封面 |  | 描述 | The synthesis of multicomponent/multilayered superconducting,conducting, semiconducting and insulating thin films has become thesubject of an intensive, worldwide, interdisciplinary research effort.The development of deposition-characterization techniques and thescience and technology related to the synthesis of these films arecritical for the successful evolution of this interdisciplinary fieldof research and the implementation of the new materials in a whole newgeneration of advanced microdevices..This book contains the lectures and contributed papers on variousscientific and technological aspects of multicomponent andmultilayered thin films presented at a NATO/ASI. Compared to otherrecent books on thin films, the distinctive character of this book isthe interdisciplinary treatment of the various fields of researchrelated to the different thin film materials mentioned above. The widerange of topics discussed in this book include vacuum-depositiontechniques, synthesis-processing, characterization, and devices ofmulticomponent/multilayered oxide high temperature superconducting,ferroelectric, electro-optic, optical, metallic, silicide, andcompound semiconductor thin films..The book | 出版日期 | Book 1993 | 关键词 | crystal; electron microscopy; metal; microscopy; modeling; spectroscopic analysis; thin film | 版次 | 1 | doi | https://doi.org/10.1007/978-94-011-1727-2 | isbn_softcover | 978-94-010-4757-9 | isbn_ebook | 978-94-011-1727-2Series ISSN 0168-132X | issn_series | 0168-132X | copyright | Springer Science+Business Media Dordrecht 1993 |
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