书目名称 | Molecular Beam Epitaxy |
副标题 | Fundamentals and Cur |
编辑 | Marian A. Herman,Helmut Sitter |
视频video | |
丛书名称 | Springer Series in Materials Science |
图书封面 |  |
描述 | .Molecular Beam Epitaxy .describes a technique in wide-spread use for the production of high-quality semiconductor devices. It discusses the most important aspects of the MBE apparatus, the physics and chemistry of the crystallization of various materials and device structures, and the characterization methods that relate the structural parameters of the grown (or growing) film or structure to the technologically relevant procedure. In this second edition two new fields have been added: crystallization of as-grown low-dimensional heterostructures, mainly quantum wires and quantum dots, and in-growth control of the MBE crystallization process of strained-layer structures. Out-of-date material has been removed. |
出版日期 | Textbook 1996Latest edition |
关键词 | chemistry; epitaxy; film; material; production; quantum dot; semiconductor; semiconductor devices |
版次 | 2 |
doi | https://doi.org/10.1007/978-3-642-80060-3 |
isbn_softcover | 978-3-642-80062-7 |
isbn_ebook | 978-3-642-80060-3Series ISSN 0933-033X Series E-ISSN 2196-2812 |
issn_series | 0933-033X |
copyright | Springer-Verlag Berlin Heidelberg 1996 |