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Titlebook: Microsystems and Nanotechnology; Zhaoying Zhou,Zhonglin Wang,Liwei Lin Book 2012 Tsinghua University Press, Beijing and Springer-Verlag Be

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Electron Transport in Single Molecules and Nanostructuresin the past years. Quantum effects such as electron tunneling and quantum confinement effect have become predominant in nanostructures, leading to a diversity of novel transport phenomena. In particular, single electron tunneling (SET) effect, rectifying effect, negative differential resistance (NDR
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Introduction to MEMS 90’s, MEMS was formally an emerging technology. Today, MEMS has grown to be a big field with hectic international competition on many commercial applications. Without doubt, MEMS is already ubiquitous, but various new MEMS devices are continuing to show up. There is no end in sight as we continue t
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MEMS Design signal transduction, processing, control and communication. These systems have been evolving from simple function-specific devices to elaborate systems with complicated microstructures and integrative circuitry with the help of modern design tools and advanced manufacturing capabilities. Various en
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MEMS Processing and Fabrication Techniques and Technology—Silicon-Based Micromachiningr MEMS fabrication, and the most MEMS products on market are manufactured with this technology. The silicon-based micromachining technologies can be divided into two categories: surface micromachining technology and bulk micromachining technology. Instead of introducing detailed individual technique
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Optical MEMS and Nanophotonicselds impacted by MEMS techniques. Generally, microoptical elements with sizes ranging from a few microns to a few millimeters belong to the category of optical MEMS. They are inherently suited for cost effective wafer scale manufacturing as the processes are derived from the semiconductor industry.
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The Application of STM and AFM in Nanoprocess and Fabricationects. Therefore, not only are high resolution images available to us, but they offer a means to construct objects in the microscopic world. In this chapter, we will introduce nanometer processing technologies based on STM and AFM..During last decade fabrication and processing at the nanometer scale
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