书目名称 | Micromachines as Tools for Nanotechnology |
编辑 | Hiroyuki Fujita |
视频video | |
概述 | Nanotechnology is one of the key technologies of the 20th century..After intense basic and applied research, it is going to be established in industry..The techniques presented in this book are import |
丛书名称 | Microtechnology and MEMS |
图书封面 |  |
描述 | .This book addresses the use of MEMS and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in measuring and manipulating nano-objects. The book covers state-of-the-art MEMS and NEMS devices for DNA molecular handling and analysis, cell handling and culture on a chip, chemical lab-on-a-chip, multi-probes for vacuum tunneling microscopy and AFM, and characterization of quantum semiconductor structures. Readers will gain deep insight into such developments and students will learn about the emerging field of MEMS and nanotechnology.. |
出版日期 | Book 2003 |
关键词 | Technologie; biotechnology; development; environment; machine; machining; microelectromechanical system (M |
版次 | 1 |
doi | https://doi.org/10.1007/978-3-642-55503-9 |
isbn_softcover | 978-3-642-62465-0 |
isbn_ebook | 978-3-642-55503-9Series ISSN 1615-8326 Series E-ISSN 2365-0680 |
issn_series | 1615-8326 |
copyright | Springer-Verlag Berlin Heidelberg 2003 |