| 书目名称 | Micromachined Ultrasound-Based Proximity Sensors |
| 编辑 | Mark R. Hornung,Oliver Brand |
| 视频video | |
| 丛书名称 | Microsystems |
| 图书封面 |  |
| 描述 | .Micromachined Ultrasound-Based Proximity Sensors. presentsa packaged ultrasound microsystem for object detection and distancemetering based on micromachined silicon transducer elements. Itdescribes the characterization, optimization and the long-termstability of silicon membrane resonators as well as appropriatepackaging for ultrasound microsystems. ..Micromachined Ultrasound-Based Proximity Sensors. describes acost-effective approach to the realization of a micro electromechanical system (MEMS). The micromachined silicon transducerelements were fabricated using industrial IC technology combined withstandard silicon micromachining techniques. Additionally, thisapproach allows the cointegration of the driving and read-outcircuitry. To ensure the industrial applicability of the fabricatedtransducer elements intensive long-term stability and reliabilitytests were performed under various environmental conditions such ashigh temperature and humidity. .Great effort was undertaken to investigate the packaging and housingof the ultrasound system, which mainly determine the success orfailure of an industrial microsystem. A low-stress mounting of thetransducer element minimizes thermomechan |
| 出版日期 | Book 1999 |
| 关键词 | Sensor; Standard; Transducer; development; integrated circuit; microelectromechanical system (MEMS); micro |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-1-4615-4997-0 |
| isbn_softcover | 978-1-4613-7269-1 |
| isbn_ebook | 978-1-4615-4997-0Series ISSN 1389-2134 |
| issn_series | 1389-2134 |
| copyright | Springer Science+Business Media New York 1999 |
发表于 2025-3-21 16:53:58
