书目名称 | Micromachined Circuits and Devices |
副标题 | Microwave to Sub-mil |
编辑 | Shiban Kishen Koul,Sukomal Dey |
视频video | |
概述 | Highlights the design of different switching and resonant devices using state-of-the-art RF.Discusses different topologies of MEMS switches considering optimum performances.Includes design guidelines |
丛书名称 | Lecture Notes in Electrical Engineering |
图书封面 |  |
描述 | This book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millimeter wave frequency range. Wide varieties of micromachined switching networks starting from single-pole-double-throw (SPDT) to single-pole-fourteen-throw (SP14T) are discussed utilizing vertical and lateral actuation movements of the switch. Different transduction mechanisms of micromachined resonators are highlighted that includes capacitive, piezoelectric, and piezoresistive types. The book provides major design guidelines for the development of MEMS-based digital phase shifters, tunable filters, and antennas with extensive measurement data. Apart from the radio frequency (RF) requirements, an extensive guideline is given for the improvement of the reliability of micromachined switches and digital phaseshifters where multiple switches are operating simultaneously. It takes multiple iterations and extensive characterizations to conclude with a reliable MEMS digital phase shifter, and these aspects are give |
出版日期 | Book 2022 |
关键词 | Micro Electro Mechanical Systems (MEMS); RF MEMS; Microwave passive circuits; Directional couplers; Sing |
版次 | 1 |
doi | https://doi.org/10.1007/978-981-16-9443-1 |
isbn_softcover | 978-981-16-9445-5 |
isbn_ebook | 978-981-16-9443-1Series ISSN 1876-1100 Series E-ISSN 1876-1119 |
issn_series | 1876-1100 |
copyright | The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Singapor |