Titlebook: Microactuators; Electrical, Magnetic Massood Tabib-Azar Book 1998 Springer Science+Business Media New York 1998 computer.electronics.inform

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Electrical Microactuators, for a long time and coulombic actuators, in their simplest form, rely on the attraction of two charged plates or mechanical objects [1–6]. The force that can be produced by an electrostatic actuator is discussed in detail later in this chapter.

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Magnetic Microactuators,matic valves. Magnetic actuation methods offer the possibility of generating repulsive forces in addition to attractive forces. This is in contrast to electrostatic schemes which offer only attractive forces. In most cases, the force versus displacement relationship in these devices is also much bet

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Mechanical and Acoustic Microactuators and Micropumps, the starting energy itself is in the mechanical form and the actuator transforms one mechanical variable into another one [1–6]. Displacement, velocity and acceleration, and their equivalents in fluids [7– 15], are the main variables of interest and importance in mechanical actuators. Examples of t

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Chemical and Biological Microactuators,pes of actuators. Mechanisms that are used in biological systems to extract useful work from chemical reactions are quite interesting and inspiring and can be quite beneficial in the design of novel “artificial” microactuators.

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Smart Structures, of the environment on their different parts or attributes. Physical properties of materials may include color, physical dimensions, elasticity, or they may include other functions and properties, such as the ability of the material to “ push” back in response to a force field. Smart materials may u

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1386-3290 ds 232 8. 4 Chemical Sensors 241 8. 4. 1 Electrical Gas and Chemical Sensors 243 8. 4. 2 Guided-Optics Intrinsic Chemical Sensors 246 8. 4. 3 Extrinsic Chemical Sensors 250 8. 4. 4 Polymer Waveguide Chemical Sensors 251 8. 4. 5 Surface Plasmon Chemical Sensors 252 8. 4. 6 Indicator-Mediated Extrinsi

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Thermal and Phase-Transformation Microactuators,tion and they have received renewed interest in the microdevice community. Thermal actuators employing gas, liquid, and solid expansions are reported in the literature as discussed in the following sections.