Titlebook: Micro Electro Mechanical Systems; Qing-An Huang Reference work 2018 Springer Nature Singapore Pte Ltd. 2018 Micro fluid.RF MEMS.actuators.

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Behavior Modeling and Simulation of an Inertial Sensored on the implicit moment matching to accommodate the parameter variation. The second one is the trajectory piecewise-linear (TPWL) method which is developed for dealing with the strong nonlinearity. For each technique, its effectiveness is demonstrated by the applications to read devices characteri

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Online Test Microstructures of the Thermophysical Properties of MEMS Conducting Films the most important properties in MEMS technology. Steady-state thermal response and transient-state thermal response of MEMS devices depend on the thermal conductivity and the thermal diffusivity of device materials. Thermally driven microstructures, on the other hand, exploit the thermal expansion

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Fracture Properties of MEMS/NEMS Thin Filmsthe lifetime, fracture properties of thin films need to be investigated. Microtensile testing is a powerful technique to characterize the mechanical and fracture properties of microscale thin films. But the specimen preparation always causes a difficulty. The bulge test, as a relatively simple, fast

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High Temperature Silicon Pressure Sensors sensor chip used in high temperature application. Based on the SiO. isolation layer, the leakage current generating through p-n junction can be eliminated, which ensured the proper function of piezoresistors in high-temperature working condition. Secondly, the mechanics models for circular, rectang

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A Micromachined Silicon Resonant Pressure Sensoro their high accuracy, long-term stability, and quasi-digital output. This chapter begins with the introduction of the working principle of the resonant pressure sensors, illustrating key relationships between (1) intrinsic resonant frequency and structural parameters, (2) pressure under measurement

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A Micromachined Vibratory Gyroscopeerits of low power, low cost, and small volume. A MEMS gyroscope is one of the most important inertial devices, which is researched all over the world..This chapter will introduce a MEMS vibratory gyroscope, aiming to make more people understand what it is and how it works. Firstly, structure design

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